JPH02120850U - - Google Patents
Info
- Publication number
- JPH02120850U JPH02120850U JP3117089U JP3117089U JPH02120850U JP H02120850 U JPH02120850 U JP H02120850U JP 3117089 U JP3117089 U JP 3117089U JP 3117089 U JP3117089 U JP 3117089U JP H02120850 U JPH02120850 U JP H02120850U
- Authority
- JP
- Japan
- Prior art keywords
- layer metal
- lower layer
- insulating film
- gaas substrate
- mim capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 5
- 239000011229 interlayer Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3117089U JPH02120850U (en]) | 1989-03-16 | 1989-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3117089U JPH02120850U (en]) | 1989-03-16 | 1989-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120850U true JPH02120850U (en]) | 1990-09-28 |
Family
ID=31256832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3117089U Pending JPH02120850U (en]) | 1989-03-16 | 1989-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120850U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022519A (ja) * | 2012-07-17 | 2014-02-03 | Saitama Univ | 超伝導トンネル接合を用いたフォトン検出器 |
-
1989
- 1989-03-16 JP JP3117089U patent/JPH02120850U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014022519A (ja) * | 2012-07-17 | 2014-02-03 | Saitama Univ | 超伝導トンネル接合を用いたフォトン検出器 |